After years in R&D, several fab tool vendors last year finally began to ship systems based a next-generation technology called atomic layer etch (ALE). ALE is is moving into 16/14nm, but it will play ...

Compressible turbulence and isotropic mixing encompass the study of fluid flows where variations in density significantly influence the dynamics and the mixing process occurs uniformly in all ...

Several etch vendors are starting to ship next-generation selective etch tools, paving the way for new memory and logic devices. Applied Materials was the first vendor to ship a next-gen selective ...