Semiconductor logic and memory technology development continues to push the limits of process complexity and cost, especially as the industry migrates to the 5 nm node and beyond. Optimization of the ...

Future scale had to be built into system design and facility planning, and over provisioning was the engineering solution to meet future and unplanned production demands. But not today. Not anymore.

A technical paper titled “Review of virtual wafer process modeling and metrology for advanced technology development” was published by researchers at Coventor Inc., Lam Research. “Semiconductor logic ...