Microstructural characterization of BaTiO3 thin films prepared by RF-Magnetron sputtering using sintered targets from high energy ball milled powders The electronic and optical characteristics of ...

Modern wireless communication equipment relies on advanced radio frequency (RF) microelectromechanical devices. Wireless communication finds various applications such as mobile communication devices ...

Pictured is an RF magnetron sputtering system, one of the deposition tools used to make the films in this study. Credit must be given to the creator. Only noncommercial uses of the work are permitted.

ULVAC is shipping PZT piezoelectric thin-film sputtering equipment which advances the development of MEMS devices. It used to be impossible to fabricate PZT piezoelectric thin films, which constitute ...

Thin film deposition is a vacuum technique to apply coatings of pure materials onto the surface of many different objects. The coatings are composed of a single material or layers of multiple ...