Tailoring the ferroelectric properties of ZrO2 ultrathin films by interfacial engineering
spiedigitallibrary.org
Tailoring the ferroelectric properties of ZrO2 ultrathin films by interfacial engineering
The ferroelectric and antiferroelectric properties of ZrO2 ultrathin films (~12 nm in thickness) prepared by atomic layer deposition (ALD) were tailored by introducing sub-nanometer interfacial layers between the ZrO2 ultrathin film and top and bottom Pt electrodes. In terms of polarization switching ability, the ferroelectricity of ZrO2 ...
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